Synthesis and Characterization of Sb doping on thick film SnO2 Gas Sensor by Sol-Gel Method
نویسندگان
چکیده
Tin oxide (SnO2) thin films are widely used by solgel method. One of the most important factors that influence the sensitivities of sensing material is its structural properties especially surface morphology. In this work, we present preparation and characterization of undoped and antimony-doped tin oxide (Sb: SnO2) thin film nanostructures for gas sensing applications. The films were characterized by XRD, SEM and AFM. The SEM and AFM images of films showed a very smooth surface morphology with nanostructure grain size in the range of 40 to 45 nm. Sensing sensitivity of Sb: SnO2 films are much higher than undoped films.
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